Shekhawat, G. S., Briggs, G. A. D.,
Kolosov, O. & Geer, R. E.,
2001,
Characterization and metrology for ULSI Technology 2000, International Conference. Seiler, D. G., Diebold, A. C., Shaffner, T. J., McDonald, R., Bullis, W. M., Smith, P. J. & Secula, E. M. (eds.). Melville, New York:
American Institute of Physics,
p. 449-452 4 p.Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review