Research output: Contribution to Journal/Magazine › Journal article › peer-review
Stress-induced curvature of focused ion beam fabricated microcantilevers. / Prewett, P. D.; Anthony, C. J.; Cheneler, D. et al.
In: Micro and Nano Letters, Vol. 3, No. 1, 08.04.2008, p. 25-28.Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Stress-induced curvature of focused ion beam fabricated microcantilevers
AU - Prewett, P. D.
AU - Anthony, C. J.
AU - Cheneler, D.
AU - Ward, M. C. L.
PY - 2008/4/8
Y1 - 2008/4/8
N2 - Microcantilevers with very low spring constants, as required to measure the short-range Casimir force, can be fabricated by focused ion beam thinning of conventional atomic force microscope cantilevers, but the resulting beams have a stress-induced curvature. This can be explained by consideration of the implanted gallium ions and associated damage effects in the etched surface. The problem can be overcome by using a complementary etch method in which top and bottom surfaces of the microcantilever are etched by the same amount.
AB - Microcantilevers with very low spring constants, as required to measure the short-range Casimir force, can be fabricated by focused ion beam thinning of conventional atomic force microscope cantilevers, but the resulting beams have a stress-induced curvature. This can be explained by consideration of the implanted gallium ions and associated damage effects in the etched surface. The problem can be overcome by using a complementary etch method in which top and bottom surfaces of the microcantilever are etched by the same amount.
U2 - 10.1049/mnl:20070072
DO - 10.1049/mnl:20070072
M3 - Journal article
VL - 3
SP - 25
EP - 28
JO - Micro and Nano Letters
JF - Micro and Nano Letters
SN - 1750-0443
IS - 1
ER -