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Test support strategies for MEMS

Research output: Contribution to conference - Without ISBN/ISSN Conference paperpeer-review

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Publication date18/06/1999
Number of pages6
Pages345-350
<mark>Original language</mark>English
Event5th IEEE International Mixed Signal Testing Workshop - Whistler, Canada
Duration: 15/06/199918/06/1999

Conference

Conference5th IEEE International Mixed Signal Testing Workshop
Country/TerritoryCanada
CityWhistler
Period15/06/9918/06/99

Abstract

Integrated test technology is becoming critically important for MEMS due to the high reliability and safety critical applications targeted. High quality levels in production require efficient test strategies that are properly validated. Fault simulation and testability analysis are critical utilities required to support this process.

This paper will discuss methods for achieving test support based on the extension of tools and techniques currently being introduced into the mixed signal ASIC market.