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Accepted author manuscript, 1.37 MB, PDF document
Available under license: CC BY: Creative Commons Attribution 4.0 International License
Final published version
Research output: Contribution to Journal/Magazine › Journal article › peer-review
<mark>Journal publication date</mark> | 08/2016 |
---|---|
<mark>Journal</mark> | Journal of Micromechanical Systems |
Issue number | 4 |
Volume | 25 |
Number of pages | 9 |
Pages (from-to) | 761-769 |
Publication Status | Published |
Early online date | 19/05/16 |
<mark>Original language</mark> | English |