Research output: Contribution to Journal/Magazine › Journal article
Research output: Contribution to Journal/Magazine › Journal article
}
TY - JOUR
T1 - Using bias superposition to test a thick film conductance sensor.
AU - Jeffery, Carl
AU - Zhou, Xu
AU - Richardson, Andrew M. D.
N1 - Proceedings of the Sensors and their Applications XIII Conference.
PY - 2005
Y1 - 2005
N2 - A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique `Bias Superposition' utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor.
AB - A novel on-line monitoring technique for a range of MEMS and integrated sensor systems is presented based on the injection of a test stimuli into the bias structure of transducer functions. The technique `Bias Superposition' utilises both signal injection and signal extraction techniques to achieve an indication of structural integrity of the transducer and interface. The technique has been successfully applied to a thick film conductance sensor.
U2 - 10.1088/1742-6596/15/1/027
DO - 10.1088/1742-6596/15/1/027
M3 - Journal article
VL - 15
SP - 161
EP - 166
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6596
ER -