Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Very low field electron emission from hot filament CVD grown microcrystalline diamond
AU - Satyanarayana, B.S.
AU - Peng, X.L.
AU - Adamopoulos, George
AU - Robertson, J.
AU - Milne, W.I.
AU - Clyne, T.W.
PY - 2000
Y1 - 2000
N2 - Very low threshold field emission from undoped microcrystalline diamond films grown by the hot filament chemical vapour deposition process (HFCVD) is reported. The effect of crystal size, methane concentration and the temperature has been studied. The microcrystalline diamond films grown using 3% methane (CH4) / hydrogen (H2) gas mixture ratio under varying deposition temperatures exhibit very low emission threshold fields. The threshold fields varied from 0.4 V/μm to 1 V/μm for an emission current density of 1 μA/cm2. A correlation between the emission characteristics and the material properties is presented. These films exhibit an emission site density of ∼104-105/cm2 at an applied field of 3 V/μm.
AB - Very low threshold field emission from undoped microcrystalline diamond films grown by the hot filament chemical vapour deposition process (HFCVD) is reported. The effect of crystal size, methane concentration and the temperature has been studied. The microcrystalline diamond films grown using 3% methane (CH4) / hydrogen (H2) gas mixture ratio under varying deposition temperatures exhibit very low emission threshold fields. The threshold fields varied from 0.4 V/μm to 1 V/μm for an emission current density of 1 μA/cm2. A correlation between the emission characteristics and the material properties is presented. These films exhibit an emission site density of ∼104-105/cm2 at an applied field of 3 V/μm.
KW - Chemical vapor deposition
KW - Concentration (process)
KW - Current density
KW - Electron emission
KW - Film growth
KW - Polycrystalline materials
KW - Hot filaments
KW - Diamond films
U2 - 10.1557/PROC-621-Q5.3.1
DO - 10.1557/PROC-621-Q5.3.1
M3 - Journal article
VL - 621
SP - Q531-Q537
JO - MRS Online Proceedings Library
JF - MRS Online Proceedings Library
SN - 0272-9172
ER -