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Tungstate sharpening: A versatile method for extending the profile of ultra sharp tungsten probes

Research output: Contribution to Journal/MagazineJournal articlepeer-review

Published
  • R Stone
  • Mark C. Rosamond
  • K Coleman
  • Michael C. Petty
  • Oleg Kolosov
  • L Bowen
  • Dagou A. Zeze
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Article number035107
<mark>Journal publication date</mark>28/03/2013
<mark>Journal</mark>Review of Scientific Instruments
Issue number3
Volume84
Number of pages5
Publication StatusPublished
<mark>Original language</mark>English

Abstract

The benefits of a new electrochemical etching method for the controlled sharpening of sub-micron tungsten probes are demonstrated. The proposed technique only utilizes the insulating effect of the WO42− by-product which offers more practical ways of controlling the process parameters. The electrosharpening method was fully automated through the analysis of the process current, bulk coulometry, shadowgraphs, and time lapse microscopy. Tip radii smaller than 15 nm were maintained over a wide range of controlled lengths up to 4.5 mm with conic angles of less than 1°.