Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Tungstate sharpening: A versatile method for extending the profile of ultra sharp tungsten probes
AU - Stone, R
AU - Rosamond, Mark C.
AU - Coleman, K
AU - Petty, Michael C.
AU - Kolosov, Oleg
AU - Bowen, L
AU - Zeze, Dagou A.
PY - 2013/3/28
Y1 - 2013/3/28
N2 - The benefits of a new electrochemical etching method for the controlled sharpening of sub-micron tungsten probes are demonstrated. The proposed technique only utilizes the insulating effect of the WO42− by-product which offers more practical ways of controlling the process parameters. The electrosharpening method was fully automated through the analysis of the process current, bulk coulometry, shadowgraphs, and time lapse microscopy. Tip radii smaller than 15 nm were maintained over a wide range of controlled lengths up to 4.5 mm with conic angles of less than 1°.
AB - The benefits of a new electrochemical etching method for the controlled sharpening of sub-micron tungsten probes are demonstrated. The proposed technique only utilizes the insulating effect of the WO42− by-product which offers more practical ways of controlling the process parameters. The electrosharpening method was fully automated through the analysis of the process current, bulk coulometry, shadowgraphs, and time lapse microscopy. Tip radii smaller than 15 nm were maintained over a wide range of controlled lengths up to 4.5 mm with conic angles of less than 1°.
KW - electrochemical analysis
KW - etching
KW - tungsten
U2 - 10.1063/1.4797483
DO - 10.1063/1.4797483
M3 - Journal article
VL - 84
JO - Review of Scientific Instruments
JF - Review of Scientific Instruments
SN - 1089-7623
IS - 3
M1 - 035107
ER -