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In-situ comprehensive calibration of a tri-port nano-electro-mechanical device

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  • E. Collin
  • M. Defoort
  • K. Lulla
  • T. Moutonet
  • J. -S. Heron
  • O. Bourgeois
  • Yu M. Bunkov
  • H. Godfrin
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Article number045005
<mark>Journal publication date</mark>2012
<mark>Journal</mark>Review of Scientific Instruments
Issue number4
Volume83
Publication StatusPublished
Early online date30/04/12
<mark>Original language</mark>English

Abstract

We report on experiments performed in vacuum and at cryogenic temperatures on a tri-port nano-electro-mechanical (NEMS) device. One port is a very non-linear capacitive actuation, while the two others implement the magnetomotive scheme with a linear input force port and a (quasi-linear) output velocity port. We present an experimental method enabling a full characterization of the nanomechanical device harmonic response: the non-linear capacitance function $C(x)$ is derived, and the normal parameters $k$ and $m$ (spring constant and mass) of the mode under study are measured through a careful definition of the motion (in meters) and of the applied forces (in Newtons). These results are obtained with a series of purely electric measurements performed without disconnecting/reconnecting the device, and rely only on known DC properties of the circuit, making use of a thermometric property of the oscillator itself: we use the Young modulus of the coating metal as a thermometer, and the resistivity for Joule heating. The setup requires only three connecting lines without any particular matching, enabling the preservation of a high impedance NEMS environment even at MHz frequencies. The experimental data are fit to a detailed electrical and thermal model of the NEMS device, demonstrating a complete understanding of its dynamics. These methods are quite general and can be adapted (as a whole, or in parts) to a large variety of elecromechanical devices.