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Approximation algorithms for the wafer to wafer integration problem

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  • Trivikram Dokka
  • Marin Bougeret
  • Vincent Boudet
  • Rodolphe Giroudeau
  • Frits C.R. Spieksma
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Abstract

Motivated by the yield optimization problem in semiconductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 3/2 and 4/3 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special
case of the yield optimization problem can be solved in polynomial time.