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Approximation algorithms for the wafer to wafer integration problem

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  • Trivikram Dokka
  • Marin Bougeret
  • Vincent Boudet
  • Rodolphe Giroudeau
  • Frits C.R. Spieksma
Publication date2013
Host publicationApproximation and Online Algorithms: 10th International Workshop, WAOA 2012, Ljubljana, Slovenia, September 13-14, 2012, Revised Selected Papers
EditorsThomas Erlebach, Giuseppe Persiano
Place of PublicationBerlin
Number of pages12
ISBN (electronic)9783642380167
ISBN (print)9783642380150
<mark>Original language</mark>English

Publication series

NameLecture Notes in Computer Science
ISSN (Print)0302-9743
ISSN (electronic)1611-3349


Motivated by the yield optimization problem in semiconductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 3/2 and 4/3 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a special
case of the yield optimization problem can be solved in polynomial time.