Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Published

**Approximation algorithms for the wafer to wafer integration problem.** / Dokka, Trivikram; Bougeret, Marin ; Boudet, Vincent et al.

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Dokka, T, Bougeret, M, Boudet, V, Giroudeau, R & C.R. Spieksma, F 2013, Approximation algorithms for the wafer to wafer integration problem. in T Erlebach & G Persiano (eds), *Approximation and Online Algorithms: 10th International Workshop, WAOA 2012, Ljubljana, Slovenia, September 13-14, 2012, Revised Selected Papers.* vol. 7846, Lecture Notes in Computer Science, vol. 7846, Springer-Verlag, Berlin , pp. 286-297. https://doi.org/10.1007/978-3-642-38016-7_23

Dokka, T., Bougeret, M., Boudet, V., Giroudeau, R., & C.R. Spieksma, F. (2013). Approximation algorithms for the wafer to wafer integration problem. In T. Erlebach, & G. Persiano (Eds.), *Approximation and Online Algorithms: 10th International Workshop, WAOA 2012, Ljubljana, Slovenia, September 13-14, 2012, Revised Selected Papers *(Vol. 7846, pp. 286-297). (Lecture Notes in Computer Science; Vol. 7846). Springer-Verlag. https://doi.org/10.1007/978-3-642-38016-7_23

Dokka T, Bougeret M, Boudet V, Giroudeau R, C.R. Spieksma F. Approximation algorithms for the wafer to wafer integration problem. In Erlebach T, Persiano G, editors, Approximation and Online Algorithms: 10th International Workshop, WAOA 2012, Ljubljana, Slovenia, September 13-14, 2012, Revised Selected Papers. Vol. 7846. Berlin : Springer-Verlag. 2013. p. 286-297. (Lecture Notes in Computer Science). doi: 10.1007/978-3-642-38016-7_23

@inproceedings{1eea184cfbe04c3cb8a47f7ffd14ec31,

title = "Approximation algorithms for the wafer to wafer integration problem",

abstract = "Motivated by the yield optimization problem in semiconductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 3/2 and 4/3 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a specialcase of the yield optimization problem can be solved in polynomial time.",

keywords = "wafer-to-wafer integration , approximation , computational complexity, efficient algorithm",

author = "Trivikram Dokka and Marin Bougeret and Vincent Boudet and Rodolphe Giroudeau and {C.R. Spieksma}, Frits",

year = "2013",

doi = "10.1007/978-3-642-38016-7_23",

language = "English",

isbn = "9783642380150",

volume = "7846",

series = "Lecture Notes in Computer Science",

publisher = "Springer-Verlag",

pages = "286--297",

editor = "Thomas Erlebach and Giuseppe Persiano",

booktitle = "Approximation and Online Algorithms",

}

TY - GEN

T1 - Approximation algorithms for the wafer to wafer integration problem

AU - Dokka, Trivikram

AU - Bougeret, Marin

AU - Boudet, Vincent

AU - Giroudeau, Rodolphe

AU - C.R. Spieksma, Frits

PY - 2013

Y1 - 2013

N2 - Motivated by the yield optimization problem in semiconductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 3/2 and 4/3 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a specialcase of the yield optimization problem can be solved in polynomial time.

AB - Motivated by the yield optimization problem in semiconductor manufacturing, we model the wafer to wafer integration problem as a special multi-dimensional assignment problem (called WWI-m), and study it from an approximation point of view. We give approximation algorithms achieving an approximation factor of 3/2 and 4/3 for WWI-3, and we show that extensions of these algorithms to the case of arbitrary m do not give constant factor approximations. We argue that a specialcase of the yield optimization problem can be solved in polynomial time.

KW - wafer-to-wafer integration

KW - approximation

KW - computational complexity

KW - efficient algorithm

U2 - 10.1007/978-3-642-38016-7_23

DO - 10.1007/978-3-642-38016-7_23

M3 - Conference contribution/Paper

SN - 9783642380150

VL - 7846

T3 - Lecture Notes in Computer Science

SP - 286

EP - 297

BT - Approximation and Online Algorithms

A2 - Erlebach, Thomas

A2 - Persiano, Giuseppe

PB - Springer-Verlag

CY - Berlin

ER -