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Finite element analysis to support component le...
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School of Engineering
Associated organisational unit
Engineering of Microwaves, Terahertz and Light (E-MIT)
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Finite element analysis to support component level fault modelling for MEMS.
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Contribution in Book/Report/Proceedings - With ISBN/ISSN
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Chapter
Published
Overview
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R. Reichenbach
R. Rosing
Andrew M. D. Richardson
A. P. Dorey
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Publication date
2001
Host publication
Proceedings of SPIE design, test, integration and packaging of MEMS symposium
Pages
147-158
Number of pages
12
Volume
4408
<mark>Original language</mark>
English