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Engineering of Microwaves, Terahertz and Light (E-MIT)

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Finite element analysis to support component level fault modelling for MEMS.

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Chapter

Published

R. Reichenbach
R. Rosing
Andrew M. D. Richardson
A. P. Dorey

Publication date	2001
Host publication	Proceedings of SPIE design, test, integration and packaging of MEMS symposium
Pages	147-158
Number of pages	12
Volume	4408
<mark>Original language</mark>	English