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Integrating testability into microsystems

Research output: Contribution to journalJournal article

Published

Journal publication date02/1997
JournalMicrosystem Technologies
Journal number2
Volume3
Number of pages8
Pages72-79
Original languageEnglish

Abstract

The integration of sensors and actuators with microelectronics into either compact packages or onto a single silicon die is likely to be of major technological importance over the next decade. These systems are referred to as Microsystems or Micro-Electro-Mechanical-Systems (MEMS). One obstacle to mass-market introduction are difficulties with quality and reliability verification. This paper outlines the difficulties of testing microsystems, shows approaches of test generation and verification transferable from the mixed-signal Integrated-Circuit (IC) domain, and demonstrates an on-line test designed for bridge-type, micromachined accelerometer and pressure sensors [1].