Research output: Contribution to Journal/Magazine › Journal article › peer-review
Integrating testability into microsystems. / Olbrich, T ; Richardson, A ; Vermeiren, W et al.
In: Microsystem Technologies, Vol. 3, No. 2, 02.1997, p. 72-79.Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Integrating testability into microsystems
AU - Olbrich, T
AU - Richardson, A
AU - Vermeiren, W
AU - Straube, B
PY - 1997/2
Y1 - 1997/2
N2 - The integration of sensors and actuators with microelectronics into either compact packages or onto a single silicon die is likely to be of major technological importance over the next decade. These systems are referred to as Microsystems or Micro-Electro-Mechanical-Systems (MEMS). One obstacle to mass-market introduction are difficulties with quality and reliability verification. This paper outlines the difficulties of testing microsystems, shows approaches of test generation and verification transferable from the mixed-signal Integrated-Circuit (IC) domain, and demonstrates an on-line test designed for bridge-type, micromachined accelerometer and pressure sensors [1].
AB - The integration of sensors and actuators with microelectronics into either compact packages or onto a single silicon die is likely to be of major technological importance over the next decade. These systems are referred to as Microsystems or Micro-Electro-Mechanical-Systems (MEMS). One obstacle to mass-market introduction are difficulties with quality and reliability verification. This paper outlines the difficulties of testing microsystems, shows approaches of test generation and verification transferable from the mixed-signal Integrated-Circuit (IC) domain, and demonstrates an on-line test designed for bridge-type, micromachined accelerometer and pressure sensors [1].
KW - ACCELEROMETER
U2 - 10.1007/s005420050059
DO - 10.1007/s005420050059
M3 - Journal article
VL - 3
SP - 72
EP - 79
JO - Microsystem Technologies
JF - Microsystem Technologies
SN - 0946-7076
IS - 2
ER -