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Integrating testability into microsystems

Research output: Contribution to Journal/MagazineJournal articlepeer-review

<mark>Journal publication date</mark>02/1997
<mark>Journal</mark>Microsystem Technologies
Issue number2
Number of pages8
Pages (from-to)72-79
Publication StatusPublished
<mark>Original language</mark>English


The integration of sensors and actuators with microelectronics into either compact packages or onto a single silicon die is likely to be of major technological importance over the next decade. These systems are referred to as Microsystems or Micro-Electro-Mechanical-Systems (MEMS). One obstacle to mass-market introduction are difficulties with quality and reliability verification. This paper outlines the difficulties of testing microsystems, shows approaches of test generation and verification transferable from the mixed-signal Integrated-Circuit (IC) domain, and demonstrates an on-line test designed for bridge-type, micromachined accelerometer and pressure sensors [1].