Research output: Contribution to Journal/Magazine › Journal article › peer-review
<mark>Journal publication date</mark> | 02/1997 |
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<mark>Journal</mark> | Microsystem Technologies |
Issue number | 2 |
Volume | 3 |
Number of pages | 8 |
Pages (from-to) | 72-79 |
Publication Status | Published |
<mark>Original language</mark> | English |
The integration of sensors and actuators with microelectronics into either compact packages or onto a single silicon die is likely to be of major technological importance over the next decade. These systems are referred to as Microsystems or Micro-Electro-Mechanical-Systems (MEMS). One obstacle to mass-market introduction are difficulties with quality and reliability verification. This paper outlines the difficulties of testing microsystems, shows approaches of test generation and verification transferable from the mixed-signal Integrated-Circuit (IC) domain, and demonstrates an on-line test designed for bridge-type, micromachined accelerometer and pressure sensors [1].