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UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide

Research output: Contribution to conference - Without ISBN/ISSN Conference paper

E-pub ahead of print
Publication date24/04/2017
Number of pages2
Original languageEnglish
EventInternational Vacuum Electronics Conference 2017 - London
Duration: 24/04/201726/04/2017


ConferenceInternational Vacuum Electronics Conference 2017
Abbreviated titleIVEC2017
Internet address


A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.