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UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Published
Publication date9/02/2018
Host publicationIVEC 2017 - 18th International Vacuum Electronics Conference
PublisherIEEE
Number of pages2
ISBN (electronic)9781509059157
<mark>Original language</mark>English
Event18th International Vacuum Electronics Conference, IVEC 2017 - London, United Kingdom
Duration: 24/04/2017 → 26/04/2017

Conference

Conference18th International Vacuum Electronics Conference, IVEC 2017
Country/TerritoryUnited Kingdom
CityLondon
Period24/04/17 → 26/04/17

Publication series

NameIVEC 2017 - 18th International Vacuum Electronics Conference
Volume2018-January

Conference

Conference18th International Vacuum Electronics Conference, IVEC 2017
Country/TerritoryUnited Kingdom
CityLondon
Period24/04/17 → 26/04/17

Abstract

A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.