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Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review
Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review
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TY - GEN
T1 - UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide
AU - Sabaawi, Ahmed
AU - Doychinov, V.
AU - Mathisen, Storm
AU - David Paul, Steenson
AU - Letizia, Rosa
AU - Paoloni, Claudio
PY - 2018/2/9
Y1 - 2018/2/9
N2 - A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.
AB - A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.
KW - BWO
KW - double corrugated waveguide
KW - microfabrication
KW - SU8
KW - sub-THz vacuum electron devices
KW - UV-LIGA
U2 - 10.1109/IVEC.2017.8289639
DO - 10.1109/IVEC.2017.8289639
M3 - Conference contribution/Paper
T3 - IVEC 2017 - 18th International Vacuum Electronics Conference
BT - IVEC 2017 - 18th International Vacuum Electronics Conference
PB - IEEE
T2 - 18th International Vacuum Electronics Conference, IVEC 2017
Y2 - 24 April 2017 through 26 April 2017
ER -