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UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide

Research output: Contribution to conference - Without ISBN/ISSN Conference paper

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UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. / Sabaawi, Ahmed; Doychinov, V.; Mathisen, Storm; David Paul, Steenson; Letizia, Rosa; Paoloni, Claudio.

2017. Paper presented at International Vacuum Electronics Conference 2017, .

Research output: Contribution to conference - Without ISBN/ISSN Conference paper

Harvard

Sabaawi, A, Doychinov, V, Mathisen, S, David Paul, S, Letizia, R & Paoloni, C 2017, 'UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide' Paper presented at International Vacuum Electronics Conference 2017, 24/04/17 - 26/04/17, .

APA

Sabaawi, A., Doychinov, V., Mathisen, S., David Paul, S., Letizia, R., & Paoloni, C. (2017). UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. Paper presented at International Vacuum Electronics Conference 2017, .

Vancouver

Sabaawi A, Doychinov V, Mathisen S, David Paul S, Letizia R, Paoloni C. UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. 2017. Paper presented at International Vacuum Electronics Conference 2017, .

Author

Sabaawi, Ahmed ; Doychinov, V. ; Mathisen, Storm ; David Paul, Steenson ; Letizia, Rosa ; Paoloni, Claudio. / UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. Paper presented at International Vacuum Electronics Conference 2017, .2 p.

Bibtex

@conference{54bec86959c144f3831bdd15a3536bab,
title = "UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide",
abstract = "A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.",
author = "Ahmed Sabaawi and V. Doychinov and Storm Mathisen and {David Paul}, Steenson and Rosa Letizia and Claudio Paoloni",
year = "2017",
month = "4",
day = "24",
language = "English",
note = "International Vacuum Electronics Conference 2017, IVEC2017 ; Conference date: 24-04-2017 Through 26-04-2017",
url = "http://www.ivec2017.org",

}

RIS

TY - CONF

T1 - UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide

AU - Sabaawi, Ahmed

AU - Doychinov, V.

AU - Mathisen, Storm

AU - David Paul, Steenson

AU - Letizia, Rosa

AU - Paoloni, Claudio

PY - 2017/4/24

Y1 - 2017/4/24

N2 - A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.

AB - A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.

M3 - Conference paper

ER -