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UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

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UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. / Sabaawi, Ahmed; Doychinov, V.; Mathisen, Storm et al.
IVEC 2017 - 18th International Vacuum Electronics Conference. IEEE, 2018. (IVEC 2017 - 18th International Vacuum Electronics Conference; Vol. 2018-January).

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Harvard

Sabaawi, A, Doychinov, V, Mathisen, S, David Paul, S, Letizia, R & Paoloni, C 2018, UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. in IVEC 2017 - 18th International Vacuum Electronics Conference. IVEC 2017 - 18th International Vacuum Electronics Conference, vol. 2018-January, IEEE, 18th International Vacuum Electronics Conference, IVEC 2017, London, United Kingdom, 24/04/17. https://doi.org/10.1109/IVEC.2017.8289639

APA

Sabaawi, A., Doychinov, V., Mathisen, S., David Paul, S., Letizia, R., & Paoloni, C. (2018). UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. In IVEC 2017 - 18th International Vacuum Electronics Conference (IVEC 2017 - 18th International Vacuum Electronics Conference; Vol. 2018-January). IEEE. https://doi.org/10.1109/IVEC.2017.8289639

Vancouver

Sabaawi A, Doychinov V, Mathisen S, David Paul S, Letizia R, Paoloni C. UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. In IVEC 2017 - 18th International Vacuum Electronics Conference. IEEE. 2018. (IVEC 2017 - 18th International Vacuum Electronics Conference). Epub 2017 Apr 24. doi: 10.1109/IVEC.2017.8289639

Author

Sabaawi, Ahmed ; Doychinov, V. ; Mathisen, Storm et al. / UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide. IVEC 2017 - 18th International Vacuum Electronics Conference. IEEE, 2018. (IVEC 2017 - 18th International Vacuum Electronics Conference).

Bibtex

@inproceedings{54bec86959c144f3831bdd15a3536bab,
title = "UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide",
abstract = "A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.",
keywords = "BWO, double corrugated waveguide, microfabrication, SU8, sub-THz vacuum electron devices, UV-LIGA",
author = "Ahmed Sabaawi and V. Doychinov and Storm Mathisen and {David Paul}, Steenson and Rosa Letizia and Claudio Paoloni",
year = "2018",
month = feb,
day = "9",
doi = "10.1109/IVEC.2017.8289639",
language = "English",
series = "IVEC 2017 - 18th International Vacuum Electronics Conference",
publisher = "IEEE",
booktitle = "IVEC 2017 - 18th International Vacuum Electronics Conference",
note = "18th International Vacuum Electronics Conference, IVEC 2017 ; Conference date: 24-04-2017 Through 26-04-2017",

}

RIS

TY - GEN

T1 - UV-LIGA Microfabrication of 0.3 THz Double Corrugated Waveguide

AU - Sabaawi, Ahmed

AU - Doychinov, V.

AU - Mathisen, Storm

AU - David Paul, Steenson

AU - Letizia, Rosa

AU - Paoloni, Claudio

PY - 2018/2/9

Y1 - 2018/2/9

N2 - A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.

AB - A microfabrication process has been developed by using ultraviolet photolithography (UV-LIGA) with multi-layer SU-8 photoresist to create high aspect ratio Slow Wave Structures (SWS) for millimeter waves and THz vacuum electron devices. The main steps of the process will be described, applied to the fabrication of a double corrugated waveguide at 300 GHz.

KW - BWO

KW - double corrugated waveguide

KW - microfabrication

KW - SU8

KW - sub-THz vacuum electron devices

KW - UV-LIGA

U2 - 10.1109/IVEC.2017.8289639

DO - 10.1109/IVEC.2017.8289639

M3 - Conference contribution/Paper

T3 - IVEC 2017 - 18th International Vacuum Electronics Conference

BT - IVEC 2017 - 18th International Vacuum Electronics Conference

PB - IEEE

T2 - 18th International Vacuum Electronics Conference, IVEC 2017

Y2 - 24 April 2017 through 26 April 2017

ER -