Final published version
Research output: Contribution to Journal/Magazine › Journal article › peer-review
| <mark>Journal publication date</mark> | 05/2008 |
|---|---|
| <mark>Journal</mark> | Microelectronic Engineering |
| Issue number | 5-6 |
| Volume | 85 |
| Number of pages | 3 |
| Pages (from-to) | 1440-1442 |
| Publication Status | Published |
| Early online date | 9/02/08 |
| <mark>Original language</mark> | English |