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An ISFET Sensor-Integrated Micromixer for pH Measurements

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An ISFET Sensor-Integrated Micromixer for pH Measurements. / Acar, Gizem; Alijani, Hossein; Kosar, Ali et al.
2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE, 2020.

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Harvard

Acar, G, Alijani, H, Kosar, A & Yapici, MK 2020, An ISFET Sensor-Integrated Micromixer for pH Measurements. in 2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE. https://doi.org/10.1109/eurosime48426.2020.9152729

APA

Acar, G., Alijani, H., Kosar, A., & Yapici, M. K. (2020). An ISFET Sensor-Integrated Micromixer for pH Measurements. In 2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) IEEE. https://doi.org/10.1109/eurosime48426.2020.9152729

Vancouver

Acar G, Alijani H, Kosar A, Yapici MK. An ISFET Sensor-Integrated Micromixer for pH Measurements. In 2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE. 2020 doi: 10.1109/eurosime48426.2020.9152729

Author

Acar, Gizem ; Alijani, Hossein ; Kosar, Ali et al. / An ISFET Sensor-Integrated Micromixer for pH Measurements. 2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE). IEEE, 2020.

Bibtex

@inproceedings{a80752f92c5b4c6fbc2eb8187fdba3e3,
title = "An ISFET Sensor-Integrated Micromixer for pH Measurements",
abstract = "This study reports the design and numerical modelling of a microfluidic mixer with an integrated ion-sensitive transistor (ISFET) for sensing of pH values. The valves in the microfluidic device allowed adjustment of the flow rate of each solution and different pH values for the mixture was achieved. At high flow rates around 1500μL/min, pH value of the solution could be controlled in the range of 3-12 with a response time on the order of seconds. The performance of the proposed micromixer in mixing diluted acid and base solutions was simulated using COMSOL Multiphysics software. Current-voltage characteristics were obtained by using silicon dioxide (SiO 2 ) and tantalum pentoxide (Ta 2 O 5 ) as the gate dielectric, and pH sensitivities were compared. Upon optimization of the micromixer and sensor, a numerical model, which included both components was developed by setting the flow rates of diluted acid and base solutions. This enabled active control on the pH of the mixed solution, which was exposed to the ISFET pH sensor at the outlet of the micromixer, where the ISFET sensor continuously monitored the pH of the solution with a separate readout circuit.",
author = "Gizem Acar and Hossein Alijani and Ali Kosar and Yapici, {Murat Kaya}",
year = "2020",
month = jul,
day = "30",
doi = "10.1109/eurosime48426.2020.9152729",
language = "English",
isbn = "978-1-7281-6050-4",
booktitle = "2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)",
publisher = "IEEE",

}

RIS

TY - GEN

T1 - An ISFET Sensor-Integrated Micromixer for pH Measurements

AU - Acar, Gizem

AU - Alijani, Hossein

AU - Kosar, Ali

AU - Yapici, Murat Kaya

PY - 2020/7/30

Y1 - 2020/7/30

N2 - This study reports the design and numerical modelling of a microfluidic mixer with an integrated ion-sensitive transistor (ISFET) for sensing of pH values. The valves in the microfluidic device allowed adjustment of the flow rate of each solution and different pH values for the mixture was achieved. At high flow rates around 1500μL/min, pH value of the solution could be controlled in the range of 3-12 with a response time on the order of seconds. The performance of the proposed micromixer in mixing diluted acid and base solutions was simulated using COMSOL Multiphysics software. Current-voltage characteristics were obtained by using silicon dioxide (SiO 2 ) and tantalum pentoxide (Ta 2 O 5 ) as the gate dielectric, and pH sensitivities were compared. Upon optimization of the micromixer and sensor, a numerical model, which included both components was developed by setting the flow rates of diluted acid and base solutions. This enabled active control on the pH of the mixed solution, which was exposed to the ISFET pH sensor at the outlet of the micromixer, where the ISFET sensor continuously monitored the pH of the solution with a separate readout circuit.

AB - This study reports the design and numerical modelling of a microfluidic mixer with an integrated ion-sensitive transistor (ISFET) for sensing of pH values. The valves in the microfluidic device allowed adjustment of the flow rate of each solution and different pH values for the mixture was achieved. At high flow rates around 1500μL/min, pH value of the solution could be controlled in the range of 3-12 with a response time on the order of seconds. The performance of the proposed micromixer in mixing diluted acid and base solutions was simulated using COMSOL Multiphysics software. Current-voltage characteristics were obtained by using silicon dioxide (SiO 2 ) and tantalum pentoxide (Ta 2 O 5 ) as the gate dielectric, and pH sensitivities were compared. Upon optimization of the micromixer and sensor, a numerical model, which included both components was developed by setting the flow rates of diluted acid and base solutions. This enabled active control on the pH of the mixed solution, which was exposed to the ISFET pH sensor at the outlet of the micromixer, where the ISFET sensor continuously monitored the pH of the solution with a separate readout circuit.

U2 - 10.1109/eurosime48426.2020.9152729

DO - 10.1109/eurosime48426.2020.9152729

M3 - Conference contribution/Paper

SN - 978-1-7281-6050-4

BT - 2020 21st International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE)

PB - IEEE

ER -