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Generation of MEMS component models using Cosserat symbolic simulations

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

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Generation of MEMS component models using Cosserat symbolic simulations. / Rosing, Richard; Wang, Charles; Tucker, Robin et al.
SPIE Proceedings: design, test, integration, and packaging of MEMS/MOEMS 2002. Vol. 4755 2002. p. 149-154.

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Harvard

Rosing, R, Wang, C, Tucker, R, Richardson, A & De Masi, B 2002, Generation of MEMS component models using Cosserat symbolic simulations. in SPIE Proceedings: design, test, integration, and packaging of MEMS/MOEMS 2002. vol. 4755, pp. 149-154. https://doi.org/10.1117/12.462805

APA

Rosing, R., Wang, C., Tucker, R., Richardson, A., & De Masi, B. (2002). Generation of MEMS component models using Cosserat symbolic simulations. In SPIE Proceedings: design, test, integration, and packaging of MEMS/MOEMS 2002 (Vol. 4755, pp. 149-154) https://doi.org/10.1117/12.462805

Vancouver

Rosing R, Wang C, Tucker R, Richardson A, De Masi B. Generation of MEMS component models using Cosserat symbolic simulations. In SPIE Proceedings: design, test, integration, and packaging of MEMS/MOEMS 2002. Vol. 4755. 2002. p. 149-154 doi: 10.1117/12.462805

Author

Rosing, Richard ; Wang, Charles ; Tucker, Robin et al. / Generation of MEMS component models using Cosserat symbolic simulations. SPIE Proceedings: design, test, integration, and packaging of MEMS/MOEMS 2002. Vol. 4755 2002. pp. 149-154

Bibtex

@inproceedings{01dfe0b55147405fbbc1688e334df585,
title = "Generation of MEMS component models using Cosserat symbolic simulations",
abstract = "This paper describes how models of slender MEMS components can be generated using symbolic simulations based on Cosserat theory. Due to the generality of the method, models can be generated for a wide range of components under different stress conditions. The structure of the Cosserat- based models is presented, showing their concise, mathematically accurate representation. This potentially results in faster simulation results than finite element analysis, requiring detailed 3d meshed models. The use of Cosserat models in symbolic simulations enables generation of closed-form expressions for the dynamics of components with complex shapes. The influence of various stress conditions, such as package-induced and residual stress, on the behavior of the component can be included in these expressions.",
author = "Richard Rosing and Charles Wang and Robin Tucker and Andrew Richardson and {De Masi}, Biagio",
year = "2002",
doi = "10.1117/12.462805",
language = "English",
volume = "4755",
pages = "149--154",
booktitle = "SPIE Proceedings",

}

RIS

TY - GEN

T1 - Generation of MEMS component models using Cosserat symbolic simulations

AU - Rosing, Richard

AU - Wang, Charles

AU - Tucker, Robin

AU - Richardson, Andrew

AU - De Masi, Biagio

PY - 2002

Y1 - 2002

N2 - This paper describes how models of slender MEMS components can be generated using symbolic simulations based on Cosserat theory. Due to the generality of the method, models can be generated for a wide range of components under different stress conditions. The structure of the Cosserat- based models is presented, showing their concise, mathematically accurate representation. This potentially results in faster simulation results than finite element analysis, requiring detailed 3d meshed models. The use of Cosserat models in symbolic simulations enables generation of closed-form expressions for the dynamics of components with complex shapes. The influence of various stress conditions, such as package-induced and residual stress, on the behavior of the component can be included in these expressions.

AB - This paper describes how models of slender MEMS components can be generated using symbolic simulations based on Cosserat theory. Due to the generality of the method, models can be generated for a wide range of components under different stress conditions. The structure of the Cosserat- based models is presented, showing their concise, mathematically accurate representation. This potentially results in faster simulation results than finite element analysis, requiring detailed 3d meshed models. The use of Cosserat models in symbolic simulations enables generation of closed-form expressions for the dynamics of components with complex shapes. The influence of various stress conditions, such as package-induced and residual stress, on the behavior of the component can be included in these expressions.

U2 - 10.1117/12.462805

DO - 10.1117/12.462805

M3 - Conference contribution/Paper

VL - 4755

SP - 149

EP - 154

BT - SPIE Proceedings

ER -