Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
}
TY - JOUR
T1 - High-frequency metallic nanomechanical resonators
AU - Li, T. F.
AU - Pashkin, Yuri
AU - Astafiev, O.
AU - Nakamura, Y.
AU - Tsai, J. S.
AU - Im, H.
PY - 2008/1/28
Y1 - 2008/1/28
N2 - We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators. (C) 2008 American Institute of Physics.
AB - We developed a technology to fabricate fully metallic doubly clamped beams working as nanomechanical resonators. Measured with a magnetomotive detection scheme, the beams, made of polycrystalline metal films, show as good quality as previously reported ones made of single crystal materials, such as Si, GaAs, AlN, and SiC. Our method is compatible with the conventional fabrication process for nanoscale electronic circuits and thus offers a possibility of easily integrating the beams into superconducting charge and flux qubits and single-electron transistors as well as coupling them to coplanar waveguide resonators. (C) 2008 American Institute of Physics.
UR - http://www.scopus.com/inward/record.url?scp=38949094555&partnerID=8YFLogxK
U2 - 10.1063/1.2838749
DO - 10.1063/1.2838749
M3 - Journal article
VL - 92
SP - -
JO - Applied Physics Letters
JF - Applied Physics Letters
SN - 0003-6951
IS - 4
M1 - 043112
ER -