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Interatomic force microscope and sample observing method therefor

Research output: Patent

  • K YAMANAKA (Inventor)
  • Oleg Kolosov (Inventor)
  • H OGISO (Inventor)
  • H SATO (Inventor)
  • T KODA (Inventor)
Patent numberJP-6323834
IPCG01B 11/30; G01B 21/30
<mark>Original language</mark>English


PURPOSE:To provide a measuring technology for interatomic microscope in which the irregular sample can be separated well from the frictional force. SOLUTION :An oscillating force applied laterally relatively between a sample 8 and a probe 4 Is provided. The sample 8 tilted laterally to excite bending orthogonal oscillation. The phase and the amplitude of the oscillation of the cantilever are detected.