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Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation

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Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation. / Degl'Innocenti, R.; Reidt, S.; Guarino, A. et al.
In: Journal of Applied Physics, Vol. 100, No. 11, 113121, 2006.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Degl'Innocenti, R, Reidt, S, Guarino, A, Rezzonico, D, Poberaj, G & Günter, P 2006, 'Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation', Journal of Applied Physics, vol. 100, no. 11, 113121. https://doi.org/10.1063/1.2396716

APA

Degl'Innocenti, R., Reidt, S., Guarino, A., Rezzonico, D., Poberaj, G., & Günter, P. (2006). Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation. Journal of Applied Physics, 100(11), Article 113121. https://doi.org/10.1063/1.2396716

Vancouver

Degl'Innocenti R, Reidt S, Guarino A, Rezzonico D, Poberaj G, Günter P. Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation. Journal of Applied Physics. 2006;100(11):113121. Epub 2006 Dec 13. doi: 10.1063/1.2396716

Author

Degl'Innocenti, R. ; Reidt, S. ; Guarino, A. et al. / Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation. In: Journal of Applied Physics. 2006 ; Vol. 100, No. 11.

Bibtex

@article{ae73a17b1d304b66ac9c52e965a8d970,
title = "Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation",
abstract = "We report on a technique for the fabrication of ridge optical waveguides on top of Β- BaB2 O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dBcm at 532 nm, making them suitable for nonlinear- and electro-optical applications.",
author = "R. Degl'Innocenti and S. Reidt and A. Guarino and D. Rezzonico and G. Poberaj and P. G{\"u}nter",
year = "2006",
doi = "10.1063/1.2396716",
language = "English",
volume = "100",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "AMER INST PHYSICS",
number = "11",

}

RIS

TY - JOUR

T1 - Micromachining of ridge optical waveguides on top of He+ -implanted Β-BaB2O4 crystals by femtosecond laser ablation

AU - Degl'Innocenti, R.

AU - Reidt, S.

AU - Guarino, A.

AU - Rezzonico, D.

AU - Poberaj, G.

AU - Günter, P.

PY - 2006

Y1 - 2006

N2 - We report on a technique for the fabrication of ridge optical waveguides on top of Β- BaB2 O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dBcm at 532 nm, making them suitable for nonlinear- and electro-optical applications.

AB - We report on a technique for the fabrication of ridge optical waveguides on top of Β- BaB2 O4 (BBO) crystals. The BBO crystals were first implanted by He+ ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar+ ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dBcm at 532 nm, making them suitable for nonlinear- and electro-optical applications.

U2 - 10.1063/1.2396716

DO - 10.1063/1.2396716

M3 - Journal article

AN - SCOPUS:33845810132

VL - 100

JO - Journal of Applied Physics

JF - Journal of Applied Physics

SN - 0021-8979

IS - 11

M1 - 113121

ER -