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Nanomechanical resonators

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<mark>Journal publication date</mark>2012
<mark>Journal</mark>Physics-Uspekhi
Issue number4
Volume55
Number of pages27
Pages (from-to)382-407
Publication StatusPublished
<mark>Original language</mark>English

Abstract

We review the current state of research into the development of nanomechanical resonators and their application as components of nanoelectromechanical and optomechanical systems for the highly sensitive detection and visualization of material structure. Methods for the manufacture and characterization of nanoscale mechanical resonators are described. We discuss quantum properties of nanomechanical resonators and dynamical cooling schemes for suppressing fluctuations in order to increase the threshold sensitivity of optomechanical and electromechanical systems.