Home > Research > Publications & Outputs > Nanoscale mapping of in situ actuating microele...

Research

Links

Text available via DOI:

Keywords

View graph of relations

Nanoscale mapping of in situ actuating microelectromechanical systems with AFM

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Published

Standard

Nanoscale mapping of in situ actuating microelectromechanical systems with AFM. / Rivas, Manuel; Vyas, Varun; Carter, Aliya et al.
In: Journal of Materials Research, Vol. 30, No. 3, 14.02.2015, p. 429-441.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Rivas, M, Vyas, V, Carter, A, Veronick, J, Khan, Y, Kolosov, OV, Polcawich, RG & Huey, BD 2015, 'Nanoscale mapping of in situ actuating microelectromechanical systems with AFM', Journal of Materials Research, vol. 30, no. 3, pp. 429-441. https://doi.org/10.1557/jmr.2014.353

APA

Rivas, M., Vyas, V., Carter, A., Veronick, J., Khan, Y., Kolosov, O. V., Polcawich, R. G., & Huey, B. D. (2015). Nanoscale mapping of in situ actuating microelectromechanical systems with AFM. Journal of Materials Research, 30(3), 429-441. https://doi.org/10.1557/jmr.2014.353

Vancouver

Rivas M, Vyas V, Carter A, Veronick J, Khan Y, Kolosov OV et al. Nanoscale mapping of in situ actuating microelectromechanical systems with AFM. Journal of Materials Research. 2015 Feb 14;30(3):429-441. Epub 2015 Jan 26. doi: 10.1557/jmr.2014.353

Author

Rivas, Manuel ; Vyas, Varun ; Carter, Aliya et al. / Nanoscale mapping of in situ actuating microelectromechanical systems with AFM. In: Journal of Materials Research. 2015 ; Vol. 30, No. 3. pp. 429-441.

Bibtex

@article{fe7dd4e9e86a497294e9f32bccc0e29d,
title = "Nanoscale mapping of in situ actuating microelectromechanical systems with AFM",
abstract = "Microelectromechanical systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in situ. Atomic force microscopy (AFM) is well suited for such studies, allowing nanoscale lateral and vertical resolution of static displacements, as well as mapping of the dynamic response of these physically actuating microsystems. In this work, the vibration of a tuning fork based viscosity sensor is mapped and compared to model experiments in air, liquid, and a curing collagen gel. The switching response of a MEMS switch with nanosecond time-scale activation is also monitored - including mapping resonances of the driving microcantilever and the displacement of an overhanging contact structure in response to periodic pulsing. Such nanoscale in situ AFM investigations of MEMS can be crucial for enhancing modeling, design, and the ultimate performance of these increasingly important and sophisticated devices.",
keywords = "QUARTZ TUNING FORK, ADAPTIVE OPTICS, MEMS TECHNOLOGY, DYNAMIC-BEHAVIOR, SHEAR-FORCE, THIN-FILMS, SENSOR, MICROSCOPY, DEVICES, MICROFLUIDICS",
author = "Manuel Rivas and Varun Vyas and Aliya Carter and James Veronick and Yusuf Khan and Kolosov, {Oleg V.} and Polcawich, {Ronald G.} and Huey, {Bryan D.}",
year = "2015",
month = feb,
day = "14",
doi = "10.1557/jmr.2014.353",
language = "English",
volume = "30",
pages = "429--441",
journal = "Journal of Materials Research",
issn = "0884-2914",
publisher = "Cambridge University Press",
number = "3",

}

RIS

TY - JOUR

T1 - Nanoscale mapping of in situ actuating microelectromechanical systems with AFM

AU - Rivas, Manuel

AU - Vyas, Varun

AU - Carter, Aliya

AU - Veronick, James

AU - Khan, Yusuf

AU - Kolosov, Oleg V.

AU - Polcawich, Ronald G.

AU - Huey, Bryan D.

PY - 2015/2/14

Y1 - 2015/2/14

N2 - Microelectromechanical systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in situ. Atomic force microscopy (AFM) is well suited for such studies, allowing nanoscale lateral and vertical resolution of static displacements, as well as mapping of the dynamic response of these physically actuating microsystems. In this work, the vibration of a tuning fork based viscosity sensor is mapped and compared to model experiments in air, liquid, and a curing collagen gel. The switching response of a MEMS switch with nanosecond time-scale activation is also monitored - including mapping resonances of the driving microcantilever and the displacement of an overhanging contact structure in response to periodic pulsing. Such nanoscale in situ AFM investigations of MEMS can be crucial for enhancing modeling, design, and the ultimate performance of these increasingly important and sophisticated devices.

AB - Microelectromechanical systems (MEMS) are increasingly at our fingertips. To understand and thereby improve their performance, especially given their ever-decreasing sizes, it is crucial to measure their functionality in situ. Atomic force microscopy (AFM) is well suited for such studies, allowing nanoscale lateral and vertical resolution of static displacements, as well as mapping of the dynamic response of these physically actuating microsystems. In this work, the vibration of a tuning fork based viscosity sensor is mapped and compared to model experiments in air, liquid, and a curing collagen gel. The switching response of a MEMS switch with nanosecond time-scale activation is also monitored - including mapping resonances of the driving microcantilever and the displacement of an overhanging contact structure in response to periodic pulsing. Such nanoscale in situ AFM investigations of MEMS can be crucial for enhancing modeling, design, and the ultimate performance of these increasingly important and sophisticated devices.

KW - QUARTZ TUNING FORK

KW - ADAPTIVE OPTICS

KW - MEMS TECHNOLOGY

KW - DYNAMIC-BEHAVIOR

KW - SHEAR-FORCE

KW - THIN-FILMS

KW - SENSOR

KW - MICROSCOPY

KW - DEVICES

KW - MICROFLUIDICS

U2 - 10.1557/jmr.2014.353

DO - 10.1557/jmr.2014.353

M3 - Journal article

VL - 30

SP - 429

EP - 441

JO - Journal of Materials Research

JF - Journal of Materials Research

SN - 0884-2914

IS - 3

ER -