Rights statement: Copyright 2014 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics, 116 (13), 2014 and may be found at http://scitation.aip.org/content/aip/journal/jap/116/13/10.1063/1.4895493
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Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Nanothermal characterization of amorphous and crystalline phases in chalcogenide thin films with scanning thermal microscopy
AU - Bosse, Jim
AU - Timofeeva, Maria
AU - Tovee, Peter
AU - Robinson, Benjamin
AU - Huey, Bryan
AU - Kolosov, Oleg
N1 - Copyright 2014 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior permission of the author and the American Institute of Physics. The following article appeared in Journal of Applied Physics, 116 (13), 2014 and may be found at http://scitation.aip.org/content/aip/journal/jap/116/13/10.1063/1.4895493
PY - 2014/10/7
Y1 - 2014/10/7
N2 - The thermal properties of amorphous and crystalline phases in chalcogenide phase change materials (PCM) play a key role in device performance for non-volatile random-access memory. Here, we report the nanothermal morphology of amorphous and crystalline phases in laser pulsed GeTe and Ge2Sb2Te5 thin films by scanning thermal microscopy (SThM). By SThM measurements and quantitative finite element analysis simulations of two film thicknesses, the PCM thermal conductivities and thermal boundary conductances between the PCM and SThM probe are independently estimated for the amorphous and crystalline phase of each stoichiometry.
AB - The thermal properties of amorphous and crystalline phases in chalcogenide phase change materials (PCM) play a key role in device performance for non-volatile random-access memory. Here, we report the nanothermal morphology of amorphous and crystalline phases in laser pulsed GeTe and Ge2Sb2Te5 thin films by scanning thermal microscopy (SThM). By SThM measurements and quantitative finite element analysis simulations of two film thicknesses, the PCM thermal conductivities and thermal boundary conductances between the PCM and SThM probe are independently estimated for the amorphous and crystalline phase of each stoichiometry.
U2 - 10.1063/1.4895493
DO - 10.1063/1.4895493
M3 - Journal article
VL - 116
JO - Journal of Applied Physics
JF - Journal of Applied Physics
SN - 0021-8979
IS - 13
M1 - 134904
ER -