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  • Submillimetre rectangular waveguides based on Su-8 protoresist micromachining technology

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Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

Research output: Contribution in Book/Report/Proceedings - With ISBN/ISSN › Conference contribution/Paper › peer-review

Published
  • David Glynn
  • Tianhao He
  • Jeff Powell
  • Yingtao Tian
  • Xiaobang Shang
  • Michael J. Lancaster
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Publication date4/10/2016
Host publicationMicrowave Conference (EuMC), 2016 46th European
PublisherIEEE
Pages1346-1349
Number of pages4
ISBN (electronic)9782874870439
ISBN (print)9781509015146
<mark>Original language</mark>English

Abstract

Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

Bibliographic note

©2016 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.