TY - JOUR

T1 - Ultrasonic force microscopy for nanometer resolution subsurface imaging

AU - Yamanaka, K.

AU - Ogiso, H.

AU - Kolosov, Oleg

PY - 1994/1/10

Y1 - 1994/1/10

N2 - We present a novel method for nanometer resolution subsurface imaging. When a sample of atomic force microscope (AFM) is vertically vibrated at ultrasonic frequencies much higher than the cantilever resonance, the tip cannot vibrate but it is cyclically indented into the sample. By modulating the amplitude of ultrasonic vibration, subsurface features are imaged from the cantilever deflection vibration at the modulation frequency. By adding low-frequency lateral vibration to the ultrasonic vibration, subsurface features with different shear rigidity are imaged from the torsional vibration of cantilever. Thus controlling the direction of vibration forces, we can discriminate subsurface features of different elastic properties.

AB - We present a novel method for nanometer resolution subsurface imaging. When a sample of atomic force microscope (AFM) is vertically vibrated at ultrasonic frequencies much higher than the cantilever resonance, the tip cannot vibrate but it is cyclically indented into the sample. By modulating the amplitude of ultrasonic vibration, subsurface features are imaged from the cantilever deflection vibration at the modulation frequency. By adding low-frequency lateral vibration to the ultrasonic vibration, subsurface features with different shear rigidity are imaged from the torsional vibration of cantilever. Thus controlling the direction of vibration forces, we can discriminate subsurface features of different elastic properties.

U2 - 10.1063/1.111524

DO - 10.1063/1.111524

M3 - Journal article

VL - 64

SP - 178

EP - 180

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 2

ER -