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Stressed silicon nitride nanomechanical resonators at helium temperatures

Research output: Contribution to Journal/MagazineJournal articlepeer-review

Published
  • M. Defoort
  • K. J. Lulla
  • Christophe Blanc
  • Hossein Ftouni
  • Olivier Bourgeois
  • Eddy Collin
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<mark>Journal publication date</mark>06/2013
<mark>Journal</mark>Journal of Low Temperature Physics
Issue number5-6
Volume171
Number of pages6
Pages (from-to)731-736
Publication StatusPublished
Early online date29/08/12
<mark>Original language</mark>English

Abstract

We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 104. We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour.