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Stressed silicon nitride nanomechanical resonators at helium temperatures

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Stressed silicon nitride nanomechanical resonators at helium temperatures. / Defoort, M.; Lulla, K. J.; Blanc, Christophe et al.
In: Journal of Low Temperature Physics, Vol. 171, No. 5-6, 06.2013, p. 731-736.

Research output: Contribution to Journal/Magazine › Journal article › peer-review

Harvard

Defoort, M, Lulla, KJ, Blanc, C, Ftouni, H, Bourgeois, O & Collin, E 2013, 'Stressed silicon nitride nanomechanical resonators at helium temperatures', Journal of Low Temperature Physics, vol. 171, no. 5-6, pp. 731-736. https://doi.org/10.1007/s10909-012-0693-5

APA

Defoort, M., Lulla, K. J., Blanc, C., Ftouni, H., Bourgeois, O., & Collin, E. (2013). Stressed silicon nitride nanomechanical resonators at helium temperatures. Journal of Low Temperature Physics, 171(5-6), 731-736. https://doi.org/10.1007/s10909-012-0693-5

Vancouver

Defoort M, Lulla KJ, Blanc C, Ftouni H, Bourgeois O, Collin E. Stressed silicon nitride nanomechanical resonators at helium temperatures. Journal of Low Temperature Physics. 2013 Jun;171(5-6):731-736. Epub 2012 Aug 29. doi: 10.1007/s10909-012-0693-5

Author

Defoort, M. ; Lulla, K. J. ; Blanc, Christophe et al. / Stressed silicon nitride nanomechanical resonators at helium temperatures. In: Journal of Low Temperature Physics. 2013 ; Vol. 171, No. 5-6. pp. 731-736.

Bibtex

@article{277eadec7e314c1f897ae4573caa62e8,
title = "Stressed silicon nitride nanomechanical resonators at helium temperatures",
abstract = "We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 104. We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour.",
keywords = "Nanomechanical resonators, Nonlinear, Magnetomotive ",
author = "M. Defoort and Lulla, {K. J.} and Christophe Blanc and Hossein Ftouni and Olivier Bourgeois and Eddy Collin",
year = "2013",
month = jun,
doi = "10.1007/s10909-012-0693-5",
language = "English",
volume = "171",
pages = "731--736",
journal = "Journal of Low Temperature Physics",
issn = "0022-2291",
publisher = "SPRINGER/PLENUM PUBLISHERS",
number = "5-6",

}

RIS

TY - JOUR

T1 - Stressed silicon nitride nanomechanical resonators at helium temperatures

AU - Defoort, M.

AU - Lulla, K. J.

AU - Blanc, Christophe

AU - Ftouni, Hossein

AU - Bourgeois, Olivier

AU - Collin, Eddy

PY - 2013/6

Y1 - 2013/6

N2 - We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 104. We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour.

AB - We have characterized the mechanical resonance properties (both linear and nonlinear) of various doubly-clamped silicon nitride nanomechanical resonators, each with a different intrinsic tensile stress. The measurements were carried out at 4 K and the magnetomotive technique was used to drive and detect the motion of the beams. The resonant frequencies of the beams are in the megahertz range, with quality factors of the order of 104. We also measure the dynamic range of the beams and their nonlinear (Duffing) behaviour.

KW - Nanomechanical resonators

KW - Nonlinear

KW - Magnetomotive

U2 - 10.1007/s10909-012-0693-5

DO - 10.1007/s10909-012-0693-5

M3 - Journal article

VL - 171

SP - 731

EP - 736

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

SN - 0022-2291

IS - 5-6

ER -