Research output: Contribution to Journal/Magazine › Journal article › peer-review
Article number | 073101 |
---|---|
<mark>Journal publication date</mark> | 16/02/2009 |
<mark>Journal</mark> | Applied Physics Letters |
Issue number | 7 |
Volume | 94 |
Number of pages | 3 |
Pages (from-to) | - |
Publication Status | Published |
<mark>Original language</mark> | English |
We demonstrate electronic cooling of a suspended AuPd island using superconductor-insulator-normal metal tunnel junctions. This was achieved by developing a simple fabrication method for reliably releasing narrow submicron-sized metal beams. The process is based on reactive ion etching and uses a conducting substrate to avoid charge-up damage and is compatible with, e.g., conventional e-beam lithography, shadow-angle metal deposition, and oxide tunnel junctions. The devices function well and exhibit clear cooling, up to a factor of 2 at sub-Kelvin temperatures.