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Applicability of Sc2O3 versus Al2O3 in MIM rectifiers for IR rectenna

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Article number108082
<mark>Journal publication date</mark>31/10/2021
<mark>Journal</mark>Solid-State Electronics
Volume184
Number of pages4
Publication StatusPublished
Early online date4/06/21
<mark>Original language</mark>English

Abstract

Impedance matching between the terahertz antenna and ultra-fast Metal-Insulator-Metal (MIM) diode is a crucial issue in realizing rectenna technology for harvesting infrared (IR) energy spectrum. In this paper, scandium oxide (Sc 2O 3)-based MIM diodes were fabricated using magnetron sputtering and their rectification performance compared to state-of-the-art Au/Al 2O 3/Au diodes. The fabricated Al/Sc 2O 3/Al diode has exhibited around two orders of magnitude lower zero-bias dynamic resistance (R D0 = 956 kΩ) and high zero-bias responsivity (β 0 = 1 A/W) in advance to Au/Al 2O 3/Au diode. The results point to applicability of scandium oxide in MIM rectifiers for IR rectenna.