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Au/Ni/Au as a contact for p-type GaAs

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Published
Article number125011
<mark>Journal publication date</mark>15/11/2024
<mark>Journal</mark>Semiconductor Science and Technology
Issue number12
Volume39
Number of pages6
Publication StatusPublished
<mark>Original language</mark>English

Abstract

An easy to fabricate ohmic-contact to moderately-doped p-type GaAs has been achieved. The tri-layer Au/Ni/Au contact is deposited by thermal evaporation, followed by rapid thermal annealing in nitrogen atmosphere. A series of annealing times and temperatures are explored to determine the influence of annealing conditions on the low-resistance ohmic contacts. The resulting contacts show more than three orders of magnitude reduction in contact resistance compared to alternative Ti/Au depositions.