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  • 21PRS(BRU)SPM-3D_v2

    Final published version, 1.96 MB, PDF document

    Available under license: CC BY: Creative Commons Attribution 4.0 International License

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Beating limitations of surface-bound SPM to explore nanoscale 3D physical properties of advanced materials and devices

Research output: Contribution to conference - Without ISBN/ISSN › Speech

Published
Publication date10/03/2021
<mark>Original language</mark>English
EventEU AFMi User Meeting - Online, Germany
Duration: 10/03/2021 → 10/03/2021
https://mbns.bruker.com/acton/form/9063/04f9:d-0005/0/-/-/-/-/index.htm

Workshop

WorkshopEU AFMi User Meeting
Country/TerritoryGermany
Period10/03/21 → 10/03/21
Internet address

Abstract

While SPM enjoys great success in materials science due to outstanding sensitivity to local nanoscale physical properties of materials and devices, with lateral resolution down to atomic scale, these studies are inevitably bound to the immediate sample surface. This lecture presents successes and challenges of several key approaches allowing SPM to explore internal structure of studied samples ranging from the semiconductors to biological materials. These include Ar-ion nano-cross-sectioning SPM (xSPM), real time SPM nanotomography and ultrasound based subsurface SPM imaging.