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Research output: Contribution to conference - Without ISBN/ISSN › Speech
Research output: Contribution to conference - Without ISBN/ISSN › Speech
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TY - CONF
T1 - Beating limitations of surface-bound SPM to explore nanoscale 3D physical properties of advanced materials and devices
AU - Kolosov, Oleg
PY - 2021/3/10
Y1 - 2021/3/10
N2 - While SPM enjoys great success in materials science due to outstanding sensitivity to local nanoscale physical properties of materials and devices, with lateral resolution down to atomic scale, these studies are inevitably bound to the immediate sample surface. This lecture presents successes and challenges of several key approaches allowing SPM to explore internal structure of studied samples ranging from the semiconductors to biological materials. These include Ar-ion nano-cross-sectioning SPM (xSPM), real time SPM nanotomography and ultrasound based subsurface SPM imaging.
AB - While SPM enjoys great success in materials science due to outstanding sensitivity to local nanoscale physical properties of materials and devices, with lateral resolution down to atomic scale, these studies are inevitably bound to the immediate sample surface. This lecture presents successes and challenges of several key approaches allowing SPM to explore internal structure of studied samples ranging from the semiconductors to biological materials. These include Ar-ion nano-cross-sectioning SPM (xSPM), real time SPM nanotomography and ultrasound based subsurface SPM imaging.
KW - AFM
KW - UFM ultrasonic force microscopy
KW - 3D
KW - subsurface
KW - three dimensional
M3 - Speech
T2 - EU AFMi User Meeting
Y2 - 10 March 2021 through 10 March 2021
ER -