Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Cantilever resonance detected by tunneling current under application of RF signal
AU - Azuma, Yasuo
AU - Chorley, Simon
AU - Prance, Jonathan
AU - Smith, Charles G.
AU - Majima, Yutaka
PY - 2007
Y1 - 2007
N2 - Cantilever resonance is detected by a tunneling current between a scanning tunneling microscope probe and an Au-Ti-coated SiO2 cantilever on a Si substrate under the application of an RF signal from a Si back electrode under the SiO2 layer. The cantilever resonance frequency obtained by tunneling current measurements corresponds well with those obtained by displacement current measurements between a cantilever array and the Si back electrode. The tunneling current at the resonant condition depended on the power of the RF signal. The vibration amplitude of the cantilever was evaluated to be of the order of 1-3 angstrom by the tunneling current.
AB - Cantilever resonance is detected by a tunneling current between a scanning tunneling microscope probe and an Au-Ti-coated SiO2 cantilever on a Si substrate under the application of an RF signal from a Si back electrode under the SiO2 layer. The cantilever resonance frequency obtained by tunneling current measurements corresponds well with those obtained by displacement current measurements between a cantilever array and the Si back electrode. The tunneling current at the resonant condition depended on the power of the RF signal. The vibration amplitude of the cantilever was evaluated to be of the order of 1-3 angstrom by the tunneling current.
U2 - 10.1143/JJAP.46.3152
DO - 10.1143/JJAP.46.3152
M3 - Journal article
VL - 46
SP - 3152
EP - 3154
JO - Japanese Journal of Applied Physics
JF - Japanese Journal of Applied Physics
SN - 0021-4922
IS - 5A
ER -