Final published version
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Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Clean assembly of van der Waals heterostructures using silicon nitride membranes
AU - Wang, Wendong
AU - Clark, Nicholas
AU - Hamer, Matthew
AU - Carl, Amy
AU - Tovari, Endre
AU - Sullivan-Allsop, Sam
AU - Tillotson, Evan
AU - Gao, Yunze
AU - de Latour, Hugo
AU - Selles, Francisco
AU - Howarth, James
AU - Castanon, Eli G.
AU - Zhou, Mingwei
AU - Bai, Haoyu
AU - Li, Xiao
AU - Weston, Astrid
AU - Watanabe, Kenji
AU - Taniguchi, Takashi
AU - Mattevi, Cecilia
AU - Bointon, Thomas H.
AU - Wiper, Paul V.
AU - Strudwick, Andrew J.
AU - Ponomarenko, Leonid A.
AU - Kretinin, Andrey V.
AU - Haigh, Sarah J.
AU - Summerfield, Alex
AU - Gorbachev, Roman
PY - 2023/12/31
Y1 - 2023/12/31
N2 - Van der Waals heterostructures are fabricated by layer-by-layer assembly of individual two-dimensional materials and can be used to create a wide range of electronic devices. However, current assembly techniques typically use polymeric supports, which limit the cleanliness—and thus the electronic performance—of such devices. Here, we report a polymer-free technique for assembling van der Waals heterostructures using flexible silicon nitride membranes. Eliminating the polymeric supports allows the heterostructures to be fabricated in harsher environmental conditions (incompatible with a polymer) such as at temperatures of up to 600 °C, in organic solvents and in ultra-high vacuum. The resulting heterostructures have high-quality interfaces without interlayer contamination and exhibit strong electronic and optoelectronic behaviour. We use the technique to assemble twisted-graphene heterostructures in ultra-high vacuum, resulting in a tenfold improvement in moiré superlattice homogeneity compared to conventional transfer techniques.
AB - Van der Waals heterostructures are fabricated by layer-by-layer assembly of individual two-dimensional materials and can be used to create a wide range of electronic devices. However, current assembly techniques typically use polymeric supports, which limit the cleanliness—and thus the electronic performance—of such devices. Here, we report a polymer-free technique for assembling van der Waals heterostructures using flexible silicon nitride membranes. Eliminating the polymeric supports allows the heterostructures to be fabricated in harsher environmental conditions (incompatible with a polymer) such as at temperatures of up to 600 °C, in organic solvents and in ultra-high vacuum. The resulting heterostructures have high-quality interfaces without interlayer contamination and exhibit strong electronic and optoelectronic behaviour. We use the technique to assemble twisted-graphene heterostructures in ultra-high vacuum, resulting in a tenfold improvement in moiré superlattice homogeneity compared to conventional transfer techniques.
U2 - 10.1038/s41928-023-01075-y
DO - 10.1038/s41928-023-01075-y
M3 - Journal article
VL - 6
SP - 981
EP - 990
JO - Nature Electronics
JF - Nature Electronics
SN - 2520-1131
IS - 12
ER -