Final published version
Research output: Contribution to Journal/Magazine › Journal article › peer-review
Research output: Contribution to Journal/Magazine › Journal article › peer-review
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TY - JOUR
T1 - Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm
AU - Colangelo, Marco
AU - Walter, Alexander B.
AU - Korzh, Boris A.
AU - Schmidt, Ekkehart
AU - Bumble, Bruce
AU - Lita, Adriana E.
AU - Beyer, Andrew D.
AU - Allmaras, Jason P.
AU - Briggs, Ryan M.
AU - Kozorezov, Alexander G.
AU - Wollman, Emma E.
AU - Shaw, Matthew D.
AU - Berggren, Karl K.
PY - 2022/7/27
Y1 - 2022/7/27
N2 - The optimization of superconducting thin-films has pushed the sensitivity of superconducting nanowire single-photon detectors (SNSPDs) to the mid-infrared (mid-IR). Earlier demonstrations have shown that straight tungsten silicide nanowires can achieve unity internal detection efficiency (IDE) up to λ = 10 μm. For a high system detection efficiency (SDE), the active area needs to be increased, but material nonuniformity and nanofabrication-induced constrictions make mid-IR large-area meanders challenging to yield. In this work, we improve the sensitivity of superconducting materials and optimize a high-resolution nanofabrication process to demonstrate large-area SNSPDs with unity IDE at 7.4 μm. Our approach yields large-area meanders down to 50 nm width, with average line-width roughness below 10%, and with a lower impact from constrictions compared to previous demonstrations. Our methods pave the way to high-efficiency SNSPDs in the mid-IR band with potential impacts on astronomy, imaging, and physical chemistry.
AB - The optimization of superconducting thin-films has pushed the sensitivity of superconducting nanowire single-photon detectors (SNSPDs) to the mid-infrared (mid-IR). Earlier demonstrations have shown that straight tungsten silicide nanowires can achieve unity internal detection efficiency (IDE) up to λ = 10 μm. For a high system detection efficiency (SDE), the active area needs to be increased, but material nonuniformity and nanofabrication-induced constrictions make mid-IR large-area meanders challenging to yield. In this work, we improve the sensitivity of superconducting materials and optimize a high-resolution nanofabrication process to demonstrate large-area SNSPDs with unity IDE at 7.4 μm. Our approach yields large-area meanders down to 50 nm width, with average line-width roughness below 10%, and with a lower impact from constrictions compared to previous demonstrations. Our methods pave the way to high-efficiency SNSPDs in the mid-IR band with potential impacts on astronomy, imaging, and physical chemistry.
KW - single-photon detector
KW - nanowires
KW - SNSPD
KW - superconducting devices
KW - mid-infrared
U2 - 10.1021/acs.nanolett.1c05012
DO - 10.1021/acs.nanolett.1c05012
M3 - Journal article
VL - 22
SP - 5667
EP - 5673
JO - Nano Letters
JF - Nano Letters
SN - 1530-6984
IS - 14
ER -