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Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm

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Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm. / Colangelo, Marco; Walter, Alexander B.; Korzh, Boris A. et al.
In: Nano Letters, Vol. 22, No. 14, 27.07.2022, p. 5667-5673.

Research output: Contribution to Journal/MagazineJournal articlepeer-review

Harvard

Colangelo, M, Walter, AB, Korzh, BA, Schmidt, E, Bumble, B, Lita, AE, Beyer, AD, Allmaras, JP, Briggs, RM, Kozorezov, AG, Wollman, EE, Shaw, MD & Berggren, KK 2022, 'Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm', Nano Letters, vol. 22, no. 14, pp. 5667-5673. https://doi.org/10.1021/acs.nanolett.1c05012

APA

Colangelo, M., Walter, A. B., Korzh, B. A., Schmidt, E., Bumble, B., Lita, A. E., Beyer, A. D., Allmaras, J. P., Briggs, R. M., Kozorezov, A. G., Wollman, E. E., Shaw, M. D., & Berggren, K. K. (2022). Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm. Nano Letters, 22(14), 5667-5673. https://doi.org/10.1021/acs.nanolett.1c05012

Vancouver

Colangelo M, Walter AB, Korzh BA, Schmidt E, Bumble B, Lita AE et al. Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm. Nano Letters. 2022 Jul 27;22(14):5667-5673. Epub 2022 Jul 18. doi: 10.1021/acs.nanolett.1c05012

Author

Colangelo, Marco ; Walter, Alexander B. ; Korzh, Boris A. et al. / Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm. In: Nano Letters. 2022 ; Vol. 22, No. 14. pp. 5667-5673.

Bibtex

@article{163ee5d4f74a411190a93046a43999eb,
title = "Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm",
abstract = "The optimization of superconducting thin-films has pushed the sensitivity of superconducting nanowire single-photon detectors (SNSPDs) to the mid-infrared (mid-IR). Earlier demonstrations have shown that straight tungsten silicide nanowires can achieve unity internal detection efficiency (IDE) up to λ = 10 μm. For a high system detection efficiency (SDE), the active area needs to be increased, but material nonuniformity and nanofabrication-induced constrictions make mid-IR large-area meanders challenging to yield. In this work, we improve the sensitivity of superconducting materials and optimize a high-resolution nanofabrication process to demonstrate large-area SNSPDs with unity IDE at 7.4 μm. Our approach yields large-area meanders down to 50 nm width, with average line-width roughness below 10%, and with a lower impact from constrictions compared to previous demonstrations. Our methods pave the way to high-efficiency SNSPDs in the mid-IR band with potential impacts on astronomy, imaging, and physical chemistry.",
keywords = "single-photon detector, nanowires, SNSPD, superconducting devices, mid-infrared",
author = "Marco Colangelo and Walter, {Alexander B.} and Korzh, {Boris A.} and Ekkehart Schmidt and Bruce Bumble and Lita, {Adriana E.} and Beyer, {Andrew D.} and Allmaras, {Jason P.} and Briggs, {Ryan M.} and Kozorezov, {Alexander G.} and Wollman, {Emma E.} and Shaw, {Matthew D.} and Berggren, {Karl K.}",
year = "2022",
month = jul,
day = "27",
doi = "10.1021/acs.nanolett.1c05012",
language = "English",
volume = "22",
pages = "5667--5673",
journal = "Nano Letters",
issn = "1530-6984",
publisher = "American Chemical Society",
number = "14",

}

RIS

TY - JOUR

T1 - Large-Area Superconducting Nanowire Single-Photon Detectors for Operation at Wavelengths up to 7.4 μm

AU - Colangelo, Marco

AU - Walter, Alexander B.

AU - Korzh, Boris A.

AU - Schmidt, Ekkehart

AU - Bumble, Bruce

AU - Lita, Adriana E.

AU - Beyer, Andrew D.

AU - Allmaras, Jason P.

AU - Briggs, Ryan M.

AU - Kozorezov, Alexander G.

AU - Wollman, Emma E.

AU - Shaw, Matthew D.

AU - Berggren, Karl K.

PY - 2022/7/27

Y1 - 2022/7/27

N2 - The optimization of superconducting thin-films has pushed the sensitivity of superconducting nanowire single-photon detectors (SNSPDs) to the mid-infrared (mid-IR). Earlier demonstrations have shown that straight tungsten silicide nanowires can achieve unity internal detection efficiency (IDE) up to λ = 10 μm. For a high system detection efficiency (SDE), the active area needs to be increased, but material nonuniformity and nanofabrication-induced constrictions make mid-IR large-area meanders challenging to yield. In this work, we improve the sensitivity of superconducting materials and optimize a high-resolution nanofabrication process to demonstrate large-area SNSPDs with unity IDE at 7.4 μm. Our approach yields large-area meanders down to 50 nm width, with average line-width roughness below 10%, and with a lower impact from constrictions compared to previous demonstrations. Our methods pave the way to high-efficiency SNSPDs in the mid-IR band with potential impacts on astronomy, imaging, and physical chemistry.

AB - The optimization of superconducting thin-films has pushed the sensitivity of superconducting nanowire single-photon detectors (SNSPDs) to the mid-infrared (mid-IR). Earlier demonstrations have shown that straight tungsten silicide nanowires can achieve unity internal detection efficiency (IDE) up to λ = 10 μm. For a high system detection efficiency (SDE), the active area needs to be increased, but material nonuniformity and nanofabrication-induced constrictions make mid-IR large-area meanders challenging to yield. In this work, we improve the sensitivity of superconducting materials and optimize a high-resolution nanofabrication process to demonstrate large-area SNSPDs with unity IDE at 7.4 μm. Our approach yields large-area meanders down to 50 nm width, with average line-width roughness below 10%, and with a lower impact from constrictions compared to previous demonstrations. Our methods pave the way to high-efficiency SNSPDs in the mid-IR band with potential impacts on astronomy, imaging, and physical chemistry.

KW - single-photon detector

KW - nanowires

KW - SNSPD

KW - superconducting devices

KW - mid-infrared

U2 - 10.1021/acs.nanolett.1c05012

DO - 10.1021/acs.nanolett.1c05012

M3 - Journal article

VL - 22

SP - 5667

EP - 5673

JO - Nano Letters

JF - Nano Letters

SN - 1530-6984

IS - 14

ER -