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Oxides based resistive switching memories

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Published
  • Seref Kalem
  • Serdar B. Tekin
  • Zahit E. Kaya
  • Eric Jalaguier
  • Robin Roelofs
  • Saffet Yildirim
  • Ozgur Yavuzcetin
  • Christian Wenger
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Publication date5/03/2021
Host publicationOxide-based Materials and Devices XII
EditorsDavid J. Rogers, David C. Look, Ferechteh H. Teherani
PublisherSPIE
ISBN (electronic)9781510642096
<mark>Original language</mark>English

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
Volume11687
ISSN (Print)0277-786X
ISSN (electronic)1996-756X

Abstract

This paper presents recent progress in resistive oxide memories and their integration into advanced embedded nonvolatile memory technology nodes. With the downscaling trends in emerging semiconductor manufacturing and novel user needs such as higher density, low power consumption, high speed and reliable memories are needed by manufacturers. Two terminal memory cells based on resistive devices as oxides, phase change materials or magnetism are discussed in terms of power consumption, read/write speeds, scalability and effective cost. The experimental results are focused on oxide RRAMs with an emphasis on resistive switching of Metal/HfO2/Metal memory stacks and associated physical and electrical characteristics.