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Recent progress of laser processing technology in micro-LED display manufacturing: A review

Research output: Contribution to Journal/MagazineJournal articlepeer-review

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  • L. Song
  • X. Yong
  • P. Zhang
  • S. Song
  • K. Chen
  • H. Yan
  • T. Sun
  • Q. Lu
  • H. Shi
  • Y. Chen
  • Y. Huang
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Article number111710
<mark>Journal publication date</mark>28/02/2025
<mark>Journal</mark>Optics and Laser Technology
Volume181
Publication StatusPublished
Early online date3/09/24
<mark>Original language</mark>English

Abstract

Micro-LED undoubtedly stands out as a highly anticipated technology when it comes to the innovation of future display technologies. Micro-LED technology surpasses traditional display technologies regarding color representation, energy efficiency, and flexibility by individually assembling tiny light-emitting diodes on a substrate. Micro-LED technology, a further evolution of LED, is considered the most promising next-generation display technology due to its outstanding brightness, high contrast ratio, and extremely high pixel density. The application of laser technology in Micro-LED displays is increasingly becoming a focus of research and industry. As a highly integrated light source, lasers offer unique advantages in Micro-LED applications, including high-energy density processing, non-contact processing, precise microstructure processing and sculpting capability, efficient packaging, and improved device quality and reliability. These advantages provide a distinctive edge in achieving high-precision manufacturing and assembly of Micro-LED chips. Laser epitaxy substrate technology utilizes laser heating and material deposition to grow Micro-LED chips on a substrate. Laser etching technology achieves precise control of lasers to enable microstructure processing and sculpting of Micro-LED devices. Laser lift-off technology utilizes laser-induced decomposition of GaN to peel off the underlying material, allowing for the separation of Micro-LEDs. Laser-based massive transfer technology uses the energy of lasers to swiftly and accurately transfer Micro-LEDs from the substrate to the target substrate, enabling rapid device transfer. Lastly, laser repair technology is employed for the detection and repair of potential defects in Micro-LEDs, enhancing device quality and reliability. By utilizing lasers, we can expect to achieve higher production efficiency, more precise device manufacturing, and superior optoelectronic performance in the field of Micro-LED, thereby presenting broader prospects for future display technology and lighting applications. These laser technologies provide new solutions for Micro-LED devices’ high-precision and high-efficiency production.