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  • Zhu+et+al_2022_Chinese_Phys._B_10.1088_1674-1056_ac657d

    Rights statement: This is an author-created, un-copyedited version of an article published in Chinese Physics B. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at doi: 10.1088/1674-1056/ac657d

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Synthesis of hexagonal boron nitride films by dual temperature zone low-pressure chemical vapor deposition

Research output: Contribution to Journal/MagazineJournal articlepeer-review

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  • Zhifu Zhu
  • Shaotang Wang
  • Jijun Zou
  • He Huang
  • Zhijia Sun
  • Qinglei Xiu
  • Zhongming Zhang
  • Xiuping Yue
  • Yang Zhang
  • Jinhui Qu
  • Yong Gan
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Article number086103
<mark>Journal publication date</mark>31/08/2022
<mark>Journal</mark>Chinese Physics B
Issue number8
Volume31
Number of pages6
Publication StatusPublished
<mark>Original language</mark>English

Abstract

Hexagonal boron nitride (h-BN) films are synthesized by dual temperature zone low-pressure chemical vapor deposition (LPCVD) through using a single ammonia borane precursor on non-catalytic c-plane Al2O3 substrates. The grown films are confirmed to be h-BN films by various characterization methods. Meanwhile, the growth rates and crystal quality of h-BN films at different positions in the dual temperature zone are studied. It is found that the growth rates and crystal quality of the h-BN films at different positions on the substrate are significantly different. The growth rates of the h-BN thin films show their decreasing trends with the rearward position, while the crystal quality is improved. This work provides an experimental basis for the preparation of large area wafer thick h-BN films by LPCVD.

Bibliographic note

This is an author-created, un-copyedited version of an article published in Chinese Physics B. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at doi: 10.1088/1674-1056/ac657d