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Theory, Design, and Characterization of Nanoelectromechanical Relays for Stiction-Based Non-Volatile Memory

Research output: Contribution to Journal/MagazineJournal articlepeer-review

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  • D. Pamunuwa
  • E. Worsey
  • J.D. Reynolds
  • D. Seward
  • H.M.H. Chong
  • S. Rana
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<mark>Journal publication date</mark>30/04/2022
<mark>Journal</mark>Journal of Micromechanical Systems
Issue number2
Volume31
Number of pages9
Pages (from-to)283-291
Publication StatusPublished
Early online date4/01/22
<mark>Original language</mark>English

Abstract

Diverse areas such as the Internet of Things (IoT), aerospace and industrial electronics increasingly require non-volatile memory to work under high-temperature, radiation-hard conditions, with zero standby power. Nanoelectromechanical (NEM) relays uniquely have the potential to work at 300°C and absorb high levels of radiation, with zero leakage current across the entire operational range. While NEM relays that utilise stiction for non-volatile operation have been demonstrated, it is not clear how to design a relay to reliably achieve given programming and reprogramming voltages, an essential requirement in producing a memory. Here, we develop an analytical, first-principle physics-based model of rotational NEM relays to provide detailed understanding of how the programming and reprogramming voltages vary based on the device dimensions and surface adhesion force. We then carry out an experimental parametric study of relays with a critical dimension of ≈80 nm to characterise the surface adhesion force, and derive guidelines for how a NEM relay should be dimensioned for a given contact surface force, feature size constraints and operating requirements. We carry out a scaling study to show that voltages of ≈1 V and a footprint under ≈2 μm² can be achieved with a critical dimension of ≈10 nm, with this device architecture. [2021-0138] IEEE

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©2022 IEEE. Personal use of this material is permitted. However, permission to reprint/republish this material for advertising or promotional purposes or for creating new collective works for resale or redistribution to servers or lists, or to reuse any copyrighted component of this work in other works must be obtained from the IEEE.