Rangelow, I. W., Ahmad, A., Ivanov, T., Kaestner, M., Krivoshapkina, Y., Angelov, T., Lenk, S., Lenk, C., Ishchuk, V., Hofmann, M., Nechepurenko, D., Atanasov, I., Volland, B., Guliyev, E., Durrani, Z. A. K., Jones, M. E.,
Wang, C., Liu, D., Reum, A. & Holz, M.
& 6 others,
Nikolov, N., Majstrzyk, W., Gotszalk, T., Staaks, D., Dallorto, S. & Olynick, D. L.,
3/11/2016,
In: Journal of Vacuum Science and Technology B. 34,
6,
13 p., 06K202.
Research output: Contribution to Journal/Magazine › Journal article › peer-review